Application

19090675 · METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, RECORDING MEDIUM, AND SUBSTRATE PROCESSING APPARATUS

Filed 2025-03-26 · Pending The official file ↗ · Art unit 1711 · Examiner Michael E Barr Hard · CPC C23C 16/4405 · KOKUSAI ELECTRIC CORPORATION · VOLPE KOENIG

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

14.9 mo

to disposition n/a

Statutes raised

102 103 112

1 actions read

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