Application

19091903 · DOPANT DELIVERY SYSTEM TO ION SOURCE USING INDUCTION HEATING

Filed 2025-03-27 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC H01J 37/3171 · Axcelis Technologies, Inc. · Eschweiler & Potashnik, LLC (Axcelis)

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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