Application

19096916 · METHOD AND DEVICE FOR THE POST-TREATMENT OF A FLUORIDE LAYER FOR AN OPTICAL SYSTEM FOR THE VUV WAVELENGTH RANGE, AND OPTICAL ELEMENT COMPRISING SAID FLUORIDE LAYER

Filed 2025-04-01 · Pending The official file ↗ · Art unit 2871 · Examiner Shan Liu Typical · CPC G02B 1/12 · Carl Zeiss SMT GmbH · FISH & RICHARDSON P.C. (BO)

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.