Application

19110674 · AN ILLUMINATION MODULE FOR A METROLOGY DEVICE

Filed 2025-03-11 · Pending The official file ↗ · Art unit 2871 · Examiner James A Dudek Typical · CPC G02B 27/0944 · ASML Netherlands B.V. · Finnegan/ASML

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

18.8 mo

to disposition n/a

Statutes raised

102 103

1 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.