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19116142 · Method for Manufacturing Trench in Semiconductor Substrate, and Semiconductor Device

Filed 2025-03-27 · Granted · Patent 12469712 (2025-11-11) The official file ↗The patent and its PDF ↗ · Art unit 1713 · Examiner Jiong-Ping Lu Typical · CPC H01L 21/308 · GTA SEMICONDUCTOR CO., LTD. · THE WEBB LAW FIRM, P.C.

Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
2.9 mo
to disposition 7.5 mo
Statutes raised
103
1 actions read
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