Application

19119327 · A MICROWAVE PLASMA REACTOR WITH A PLURALITY OF EMITTERS AND ABSORBERS AND A METHOD FOR PLASMA PROCESSING A WORKPIECE USING SUCH A MICROWAVE PLASMA REACTOR

Filed 2025-04-08 · Granted The official file ↗ · Art unit 2845 · Examiner Daniel D Chang Easy · CPC H01J 37/32192 · EVATEC AG · LEYDIG VOIT & MAYER, LTD

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

16.2 mo

to disposition 18.0 mo

Statutes raised

103

1 actions read

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