Application

19134666 · SPECTRAL SENSING OF PROCESS CHAMBER CONDITIONS

Filed 2025-05-30 · Pending The official file ↗ · Art unit 1714 · Examiner Ryan L Coleman Typical · CPC H10P 72/0461 · Lam Research Corporation · WEAVER AUSTIN VILLENEUVE & SAMPSON - LAMR/NOVL

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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