Application

19177145 · WAFER CLEANING APPARATUS, PROCESSING APPARATUS, AND PROCESSING METHOD

Filed 2025-04-11 · Granted The official file ↗ · Art unit 1711 · Examiner Jason Y Ko Easy · CPC H10P 72/0412 · DISCO CORPORATION · GREER, BURNS & CRAIN, LTD

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

14.7 mo

to disposition 16.8 mo

Statutes raised

103 112

1 actions read

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