Application

19181762 · DEVICE FOR SUBSTRATE PROCESSING SYSTEM AND COMPUTER-READABLE RECORDING MEDIUM

Filed 2025-04-17 · Pending The official file ↗ · Art unit 1716 · Examiner Sylvia Macarthur Typical · CPC H10P 72/0604 · Tokyo Electron Limited · Chrisman Gallo Tochtrop LLC

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

15.0 mo

to disposition n/a

Statutes raised

0 actions read

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