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19182349 · CHUCKING STATUS DETECTION WITH CHUCKING SENSOR NORMALIZED FIGURE OF MERIT AND ACTIVE CHUCKING VOLTAGE CONTROL

Filed 2025-04-17 · Granted · Patent 12731767 (2026-09-08) The official file ↗The patent and its PDF ↗ · Art unit 3726 · Examiner Christopher James Besler Hard · CPC H01J 37/32715 · Applied Materials, Inc. · PATTERSON & SHERIDAN, LLP - - APPLIED MATERIALS

Office actions
1
first was Restriction requirement
RCEs
0
no appeal
To first action
3.4 mo
to disposition 16.7 mo
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