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19201838 · TANTALUM SPUTTERING TARGET WITH IMPROVED PERFORMANCE AND PREDICTABILITY AND METHOD OF MANUFACTURING

Filed 2025-05-07 · Granted · Patent 12545993 (2026-02-10) The official file ↗The patent and its PDF ↗ · Art unit 1794 · Examiner Jason Berman Typical · CPC C23C 14/3414 · Tosoh SMD, Inc. · MCDONALD HOPKINS LLC

Office actions
2
first was Non-final rejection
RCEs
0
no appeal
To first action
1.7 mo
to disposition 9.2 mo
Statutes raised
102 103
1 actions read
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