Application

19203733 · PLASMA BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME

Filed 2025-05-09 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC H01J 37/32633 · Samsung Electronics Co., Ltd. · Muir Patent Law, PLLC

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