Application

19209566 · PLASMA ETCHING TOOLS AND SYSTEMS

Filed 2025-05-15 · Pending The official file ↗ · Art unit 1794 · Examiner Jason Berman Typical · CPC H10P 50/73 · Tokyo Electron Limited · Slater Matsil, LLP/TEL

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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