PATLY.AIApplication
19209972 · RAPID TUNING OF CRITICAL DIMENSION NON-UNIFORMITY BY MODULATING TEMPERATURE TRANSIENTS OF MULTI-ZONE SUBSTRATE SUPPORTS
Filed 2025-05-16 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC H10P 72/0602 · Lam Research Corporation · Harness, Dickey & Pierce, P.L.C. (Lam)
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