Application

19214266 · OPTICAL SYSTEM, LITHOGRAPHY APPARATUS COMPRISING AN OPTICAL SYSTEM, AND ARRANGEMENT COMPRISING AN OPTICAL SYSTEM

Filed 2025-05-21 · Pending The official file ↗ · Art unit 2882 · Examiner Peter B Kim Typical · CPC G03F 7/70841 · Carl Zeiss SMT GmbH · FISH & RICHARDSON P.C. (BO)

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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