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19252028 · ILLUMINATION COMPENSATION METHOD

Filed 2025-06-27 · Granted · Patent 12547081 (2026-02-10) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Hung Nguyen Easy · CPC G03F 7/70141 · THE INSTITUTE OF OPTICS AND ELECTRONICS, THE CHINESE ACADEMY OF SCIENCES · Barron & Young PLLC

Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
2.0 mo
to disposition 7.5 mo
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