PATLY.AIApplication
19256200 · SUBSTRATE PROCESSING APPARATUS AND ABNORMALITY DETECTING METHOD
Filed 2025-07-01 · Pending The official file ↗ · Art unit 2877 · Examiner Chad Andrew Reverman Hard · CPC H10P 72/0616 · Tokyo Electron Limited · Xsensus
Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
14.6 mo
to disposition n/a
Statutes raised
103
1 actions read