PATLY.AIApplication
19269752 · DARK FIELD IMAGING SYSTEM WITH TWICE-DIFFRACTED LIGHT FOR OVERLAY METROLOGY
Filed 2025-07-15 · Pending The official file ↗ · Art unit 2877 · Examiner Mohamed Doumbia Hard · CPC G02B 27/44 · KLA Corporation · Suiter Swantz/KLA Joint Customer Number
Office actions
0
first was
RCEs
0
no appeal
To first action
n/a
to disposition n/a
Statutes raised
·
0 actions read