Application

19293478 · OPTICAL ELEMENT HAVING A POLISHING LAYER, LITHOGRAPHY APPARATUS COMPRISING THE OPTICAL ELEMENT, AND METHOD FOR PRODUCING THE OPTICAL ELEMENT

Filed 2025-08-07 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC G02B 1/12 · Carl Zeiss SMT GmbH · EDELL, SHAPIRO & FINNAN, LLC

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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