PATLY.AIApplication
19294625 · Absorption spectrum-based chemical vapor deposition online in-situ characterization system and method
Filed 2025-08-08 · Granted · Patent 12723976 (2026-09-01) The official file ↗The patent and its PDF ↗ · Art unit 2877 · Examiner Michael P Lapage Hard · CPC G01N 21/01 · Zhejiang University · IPro, PLLC
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