Application

19341194 · Process Vessel, Processing Apparatus, Substrate Processing Method and Method of Manufacturing Semiconductor Device

Filed 2025-09-26 · Pending The official file ↗ · Art unit 1712 · Examiner Michael G Miller Typical · CPC C23C 16/4412 · Kokusai Electric Corporation · EDELL, SHAPIRO & FINNAN, LLC

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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