PATLY.AIApplication
19349784 · AREA SELECTIVE DEPOSITION OF ALUMINUM BASED FILMS USING ALKYL ALUMINUM AMIDINATE PRECURSORS
Filed 2025-10-03 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC C07F 5/066 · ENTEGRIS, INC. · ENTEGRIS, INC./OC
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