PATLY.AIApplication
19386790 · ION IMPLANTATION SYSTEM AND METHOD FOR IMPLANTING ALUMINUM USING NON-FLUORINE-CONTAINING HALIDE SPECIES OR MOLECULES
Filed 2025-11-12 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC C23C 14/48 · Axcelis Technologies, Inc. · Eschweiler & Potashnik, LLC (Axcelis)
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