Application

19393253 · TAPERED UPPER ELECTRODE FOR UNIFORMITY CONTROL IN PLASMA PROCESSING

Filed 2025-11-18 · Pending The official file ↗ · Art unit 1716 · Examiner Laureen Chan Typical · CPC H01J 37/04 · Lam Research Corporation · PENILLA IP, APC and Lam Research Corp.

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

3.1 mo

to disposition n/a

Statutes raised

103

1 actions read

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