Application

19396422 · SUBSTRATE PROCESSING APPARATUS, PLASMA GENERATING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Filed 2025-11-21 · Pending The official file ↗ · Art unit 2845 · Examiner Pedro C Fernandez Typical · CPC H10P 72/0402 · Kokusai Electric Corporation · VOLPE KOENIG

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

5.3 mo

to disposition n/a

Statutes raised

102

1 actions read

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