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19405371 · EDGE RINGS WITH INSTEPS AND OVERSIZED HOLES FOR PREVENTING LIFT PIN CONTACT THEREWITH IN SUBSTRATE PROCESSING SYSTEMS

Filed 2025-12-01 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC H10P 72/7611 · Lam Researchn Corporation · Harness, Dickey & Pierce, P.L.C. (Lam)

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