Application

19411947 · SUBSTRATE TRANSFER APPARATUS, SUBSTRATE TRANSFER METHOD, AND COMPUTER-READABLE STORAGE MEDIUM

Filed 2025-12-08 · Pending The official file ↗ · Art unit 3657 · Examiner Sohana T Khayer Typical · CPC H10P 72/50 · Tokyo Electron Limited · JOSHUA GOLDBERG

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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