PATLY.AIApplication
19430763 · METHOD FOR TUNGSTEN-BASED THIN FILM DEPOSITION VIA FABRICATION AND DECOMPOSITION OF PRECURSOR METASTABLE COMPLEXES (MOLECULAR SPECIES)
Filed 2025-12-23 · Granted The official file ↗ · Art unit 1717 · Examiner Hai Y Zhang Typical · CPC C23C 16/14 · KALARK NANOSTRUCTURE SCIENCES INC. · PANITCH SCHWARZE BELISARIO & NADEL LLP
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