Application
19440558 · DEBRIS TRAP, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD
Filed 2026-01-05 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC G03F 7/70916 · Gigaphoton Inc. · Studebaker Brackett PLLC
Office actions
0
first was
RCEs
0
no appeal
To first action
n/a
to disposition n/a
Statutes raised
·
0 actions read