Application

19457710 · Ozone-Based DUV Laser Power Attenuation

Filed 2026-01-23 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC H01S 3/10038 · KLA Corporation · KLA Corporation

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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