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19473331 · FLASH-ENHANCED ATOMIC LAYER DEPOSITION AND CHEMICAL VAPOR DEPOSITION OF METALS

Filed 2025-10-07 · Pending The official file ↗ · Art unit 1718 · Examiner Bret P Chen Easy · CPC C23C 16/14 · Lam Research Corporation · WEAVER AUSTIN VILLENEUVE & SAMPSON - LAMR/NOVL

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