Application

19509127 · A CLEANING SYSTEM AND A METHOD FOR CLEANING A CARRIER FOR SEMICONDUCTOR SUBSTRATES OR AT LEAST A SURFACE OF THE CARRIER

Filed 2026-02-06 · Pending The official file ↗ · Art unit · Brooks Automation (Germany) GmbH · Perman & Green, LLP

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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