Application

19509796 · Illumination Optical System and Defect Inspection Device Provided Therewith

Filed 2026-02-09 · Pending The official file ↗ · Art unit · HITACHI HIGH-TECH CORPORATION · CROWELL & MORING LLP

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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