Application

19522161 · DEVICE AND METHOD FOR DRYING AND/OR CLEANING POT-SHAPED HOLLOW BODIES, IN PARTICULAR TRANSPORT CONTAINERS FOR SEMICONDUCTOR WAFERS OR FOR EUV LITHOGRAPHY MASKS

Filed 2026-03-23 · Pending The official file ↗ · Art unit · GSEC GERMAN SEMICONDUCTOR EQUIPMENT COMPANY GMBH · Maschoff Brennan

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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