Application

19528575 · COOLING METHOD AND APPARATUS OF SCANNING ELECTRON MICROSCOPE COLUMN

Filed 2026-04-15 · Pending The official file ↗ · Art unit · ASML Netherlands B.V. · Finnegan/ASML

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.