Application

19546373 · ORGANOMETALLIC PRECURSORS FOR NANOMATERIALS AND PELLICLE FOR EUV PHOTOLITHOGRAPHY AND MEHOD OF FORMATION

Filed 2026-02-22 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC G03F 1/62 · Feng Lu

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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