Application

19549584 · LITHOGRAPHIC APPARATUS, MULTI-WAVELENGTH PHASE-MODULATED SCANNING METROLOGY SYSTEM AND METHOD

Filed 2026-02-25 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC G03F 7/70625 · ASML HOLDING N.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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