Application

19549899 · Grid Assembly for Plasma Processing Apparatus

Filed 2026-02-25 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC H01J 37/3244 · Mattson Technology, Inc. · Dority & Manning, P.A. and Mattson Technology, Inc

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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