Application

19559265 · METHOD OF OPERATING A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

Filed 2026-03-06 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC G03F 7/70258 · ASML NETHERLANDS B.V. · EDELL, SHAPIRO & FINNAN, LLC

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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