PATLY.AIApplication
19566215 · RESISTIVITY-CONTROLLED DIELECTRIC MATERIALS FOR SUBSTRATE SUPPORTS WITH IMPROVED HIGH TEMPERATURE CHUCKING
Filed 2026-03-13 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC H01J 37/32724 · Applied Materials, Inc. · AMAT / Kilpatrick Townsend & Stockton LLP
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