Application

19568947 · ONIUM SALT MONOMER, POLYMER, CHEMICALLY AMPLIFIED RESIST COMPOSITION, AND PATTERN FORMING PROCESS

Filed 2026-03-17 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC G03F 7/0045 · Shin-Etsu Chemical Co., Ltd. · WHDA, LLP

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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