Application

19583384 · DETECTION METHOD FOR SHIELDED MASK MARK AND CORRECTION METHOD FOR MASK POSITION

Filed 2026-04-30 · Pending The official file ↗ · Art unit · THE INSTITUTE OF OPTICS AND ELECTRONICS, THE CHINESE ACADEMY OF SCIENCES · Barron & Young PLLC

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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