Application

19591906 · LIQUID COOLED CERAMIC WINDOW FOR INDUCTIVELY COUPLED PLASMA PROCESSING SYSTEMS

Filed 2026-05-29 · Pending The official file ↗ · Art unit · Harness, Dickey & Pierce, P.L.C. (Lam)

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.