Application

19595021 · FILM FORMING APPARATUS AND FILM FORMING METHOD, CRYSTALLINE METAL OXIDE FILM, AND LAYERED STRUCTURE AND SEMICONDUCTOR DEVICE USING CRYSTALLINE METAL OXIDE FILM

Filed 2026-06-09 · Pending The official file ↗ · Art unit · SHIN-ETSU CHEMICAL CO., LTD. · OLIFF PLC

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

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