Application

19596476 · SACRIFICIAL FILM TO REDUCE BOWING FOR A HIGH ASPECT RATIO ETCH

Filed 2026-06-12 · Pending The official file ↗ · Art unit · Lam Research Corporation · Beyer Law Group LLP/Lam

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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