Application

19600803 · EXTREME ULTRAVIOLET LIGHT GENERATION SEQUENCE FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE

Filed 2026-06-24 · Pending The official file ↗ · Art unit · ASML Netherlands B.V. · ASML CIP (San Diego) / DMIPG

Office actions

first was

RCEs

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To first action

n/a

to disposition n/a

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