PATLY.AIApplication
19617273 · SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD
Filed 2026-08-21 · Pending The official file ↗ · Art unit · Tokyo Electron Limited · Venjuris, P.C.
Office actions
0
first was
RCEs
0
no appeal
To first action
n/a
to disposition n/a
Statutes raised
·
0 actions read