Application

19621926 · ETCHING GAS COMPOSITION COMPRISING HEXAFLUOROBENZENE AND PLASMA ETCHING METHOD USING THE SAME

Filed 2026-09-07 · Pending The official file ↗ · Art unit · AJOU UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION · Revolution IP, PLLC

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

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0 actions read

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