Application

19622171 · METHOD TO DETERMINE GHOST REFLECTIONS IN AN INTERFEROMETER SYSTEM, INTERFEROMETER SYSTEM, PROJECTION SYSTEM AND EXPOSURE APPARATUS

Filed 2026-09-08 · Pending The official file ↗ · Art unit · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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