Application

19622569 · System and Method for a Wet Chemical Treatment of a Substrate Surface

Filed 2026-09-09 · Pending The official file ↗ · Art unit · Lam Research Salzburg GmbH · MARSHALL, GERSTEIN & BORUN LLP (Lam Research)

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.